期刊
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
卷 37, 期 7, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1361-6641/ac7070
关键词
electron microscopy; chemical mapping; VCSEL; lateral oxidation
类别
资金
- RENATECH (the French national network of facilities for micronanotechnology)
The lateral oxidation of AlxGa1-xAs layers buried in vertical-cavity surface-emitting lasers was studied using cross-sectional scanning transmission electron microscopy coupled with electron energy loss spectroscopy. The authors produced chemical maps and composition profiles of the oxidized AlOx layers. The sensitivity of the method allowed for the detection of trace compositions of a few % As and Ga in the AlOx with nanometer-scale spatial resolution on the recorded chemical maps.
The authors have studied the lateral oxidation of AlxGa1-xAs layers buried in vertical-cavity surface-emitting lasers using cross-sectional scanning transmission electron microscopy coupled with electron energy loss spectroscopy. Chemical maps and composition profiles of the oxidized AlOx layers have been produced. The sensitivity is such that trace compositions of a few % As and Ga can be detected in the AlOx with a spatial resolution of a few nanometers on the recorded chemical maps. To demonstrate the performance of the mapping technique, we compare results from an area in the vertical-cavity surface-emitting laser (VCSEL) which is pure AlxGa1-xAs to an oxidized area. These measurements are performed on a thin sample prepared by the focused ion beam technique within an actual VCSEL, which makes the mapping technique applicable for degradation investigations in devices at different stages of their lifetime. More generally, this measurement method is effective for detailed evaluation of AlOx layers and their fabrication process.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据