4.6 Article

Improving the structural quality and electrical resistance of SrTiO3 thin films on Si (001) via a two-step anneal

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Physics, Applied

Oxide 2D electron gases as a route for high carrier densities on (001) Si

Lior Kornblum et al.

APPLIED PHYSICS LETTERS (2015)

Article Chemistry, Multidisciplinary

Band-Gap Engineering at a Semiconductor-Crystalline Oxide Interface

Mohammadreza Jahangir-Moghadam et al.

ADVANCED MATERIALS INTERFACES (2015)

Article Physics, Applied

Surface reconstructions in molecular beam epitaxy of SrTiO3

Adam P. Kajdos et al.

APPLIED PHYSICS LETTERS (2014)

Article Materials Science, Multidisciplinary

Growth of SrTiO3 on Si(001) by hybrid molecular beam epitaxy

Lei Zhang et al.

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2014)

Article Chemistry, Multidisciplinary

Monolithically Integrated Circuits from Functional Oxides

Rainer Jany et al.

ADVANCED MATERIALS INTERFACES (2014)

Article Nanoscience & Nanotechnology

A high density two-dimensional electron gas in an oxide heterostructure on Si (001)

E. N. Jin et al.

APL MATERIALS (2014)

Article Materials Science, Coatings & Films

Epitaxial strontium titanate films grown by atomic layer deposition on SrTiO3-buffered Si(001) substrates

Martin D. McDaniel et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2013)

Article Nanoscience & Nanotechnology

Switching of ferroelectric polarization in epitaxial BaTiO3 films on silicon without a conducting bottom electrode

Catherine Dubourdieu et al.

NATURE NANOTECHNOLOGY (2013)

Article Materials Science, Multidisciplinary

Pulsed laser deposition of SrTiO3 on a H-terminated Si substrate

Matjaz Spreitzer et al.

JOURNAL OF MATERIALS CHEMISTRY C (2013)

Proceedings Paper Electrochemistry

Monolithic integration of oxides on semiconductors

Alexander A. Demkov et al.

2013 INTERNATIONAL CONFERENCE ON SEMICONDUCTOR TECHNOLOGY FOR ULTRA LARGE SCALE INTEGRATED CIRCUITS AND THIN FILM TRANSISTORS (ULSIC VS. TFT 4) (2013)

Article Materials Science, Multidisciplinary

Enhanced memory window of Au/BaTiO3/SrTiO3/Si(001) MFIS structure with high c-axis orientation for non-volatile memory applications

Gasidit Panomsuwan et al.

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING (2012)

Article Physics, Applied

Field-effect devices utilizing LaAlO3-SrTiO3 interfaces

B. Foerg et al.

APPLIED PHYSICS LETTERS (2012)

Article Materials Science, Multidisciplinary

Epitaxial La0.7Sr0.3MnO3 thin films grown on SrTiO3 buffered silicon substrates by reactive molecular-beam epitaxy

L. Mechin et al.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2012)

Article Materials Science, Multidisciplinary

Behavior of oxygen vacancies in single-crystal SrTiO3: Equilibrium distribution and diffusion kinetics

Roger A. De Souza et al.

PHYSICAL REVIEW B (2012)

Article Physics, Applied

Thermal conductivity as a metric for the crystalline quality of SrTiO3 epitaxial layers

Dong-Wook Oh et al.

APPLIED PHYSICS LETTERS (2011)

Article Physics, Applied

Epitaxial integration of photoresponsive Bi0.4Ca0.6MnO3 with Si(001)

Grace J. Yong et al.

JOURNAL OF APPLIED PHYSICS (2011)

Article Multidisciplinary Sciences

Giant Piezoelectricity on Si for Hyperactive MEMS

S. H. Baek et al.

SCIENCE (2011)

Article Engineering, Electrical & Electronic

Heteroepitaxy of SrTiO3 thin films on Si (001) using different growth strategies: Toward substratelike quality

G. Niu et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2011)

Article Materials Science, Multidisciplinary

Pulsed laser deposition-induced reduction of SrTiO3 crystals

Matthew L. Scullin et al.

ACTA MATERIALIA (2010)

Review Chemistry, Multidisciplinary

Crystalline Oxides on Silicon

James W. Reiner et al.

ADVANCED MATERIALS (2010)

Article Chemistry, Physical

Epitaxial SrTiO3 films with electron mobilities exceeding 30,000 cm(2) V-1 s(-1)

Junwoo Son et al.

NATURE MATERIALS (2010)

Article Multidisciplinary Sciences

Creation of a two-dimensional electron gas at an oxide interface on silicon

J. W. Park et al.

NATURE COMMUNICATIONS (2010)

Article Engineering, Electrical & Electronic

Growth, characterization, and uniformity analysis of 200 mm wafer-scale SrTiO3/Si

X. Gu et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2010)

Article Physics, Applied

Molecular beam epitaxy of SrTiO3 with a growth window

Bharat Jalan et al.

APPLIED PHYSICS LETTERS (2009)

Article Materials Science, Coatings & Films

Analysis of carbon in SrTiO3 grown by hybrid molecular beam epitaxy

Bharat Jalan et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2009)

Article Materials Science, Coatings & Films

Growth of high-quality SrTiO3 films using a hybrid molecular beam epitaxy approach

Bharat Jalan et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2009)

Article Engineering, Electrical & Electronic

Commercial molecular beam epitaxy production of high quality SrTiO3 on large diameter Si substrates

X. Gu et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2009)

Article Multidisciplinary Sciences

A Ferroelectric Oxide Made Directly on Silicon

Maitri P. Warusawithana et al.

SCIENCE (2009)

Article Physics, Multidisciplinary

Strain-induced polarization rotation in epitaxial (001) BiFeO3 thin films

H. W. Jang et al.

PHYSICAL REVIEW LETTERS (2008)

Article Materials Science, Ceramics

Electrical conductivity of epitaxial SrTiO3 thin films as a function of oxygen partial pressure and temperature

Christian Ohly et al.

JOURNAL OF THE AMERICAN CERAMIC SOCIETY (2006)

Article Physics, Applied

Interface structure and thermal stability of epitaxial SrTiO3 thin films on Si(001)

L. V. Goncharova et al.

JOURNAL OF APPLIED PHYSICS (2006)

Article Materials Science, Multidisciplinary

Growth of epitaxial diamond on silicon via iridium/SrTiO3 buffer layers

T Bauer et al.

DIAMOND AND RELATED MATERIALS (2005)

Article Materials Science, Multidisciplinary

Advances in heteroepitaxy of oxides on silicon

Z Yu et al.

THIN SOLID FILMS (2004)

Article Physics, Applied

Hetero-epitaxy of perovskite oxides on GaAs(001) by molecular beam epitaxy

Y Liang et al.

APPLIED PHYSICS LETTERS (2004)

Article Materials Science, Multidisciplinary

Elastic anomaly for SrTiO3 thin films grown on Si(001) -: art. no. 201403

FS Aguirre-Tostado et al.

PHYSICAL REVIEW B (2004)

Article Physics, Applied

Two-dimensional growth of high-quality strontium titanate thin films on Si

H Li et al.

JOURNAL OF APPLIED PHYSICS (2003)

Article Physics, Applied

The interface of epitaxial SrTiO3 on silicon:: in situ and ex situ studies

XM Hu et al.

APPLIED PHYSICS LETTERS (2003)

Article Engineering, Electrical & Electronic

Mechanism of cleaning Si(100) surface using Sr or SrO for the growth of crystalline SrTiO3 films

Y Wei et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2002)

Article Physics, Applied

Direct observation of atomic disordering at the SrTiO3/Si interface due to oxygen diffusion

V Shutthanandan et al.

APPLIED PHYSICS LETTERS (2002)

Article Engineering, Electrical & Electronic

Epitaxial oxide thin films on Si(001)

Z Yu et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2000)