期刊
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
卷 219, 期 10, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.202100756
关键词
electric-field strength simulation; in situ NV doping efficiency; nitrogen doping; structural analysis; substrate holder; synthetic diamond; optical-emission spectroscopy
资金
- German federal ministry for education and research Bundesministerium fur Bildung und Forschung (BMBF) [13XP5063]
In this study, the generation of nitrogen-vacancy (NV) centers in diamond during chemical vapor deposition (CVD) was investigated by altering the electric-field strength. The experiments showed that by reducing the electric-field strength, thick and high-quality nitrogen-doped diamond could be synthesized without the formation of a polycrystalline rim. The results also demonstrated significant influences of the electric-field strength on the concentrations of radical species and gas temperature, as well as the in situ NV doping efficiency.
Herein, the in situ generation of nitrogen-vacancy (NV) centers in diamond during chemical vapor deposition (CVD) is investigated depending on the electric-field strength at the sample position. The alteration of the electric-field strength is induced by changing the resonance conditions within the resonator cavity while keeping the growth input variables constant. The electric-field strength distribution is obtained by simulation results. During the growth experiments, optical-emission spectroscopy data is collected, which shows the impact of the electric-field strength on the radical concentrations within the plasma and the gas temperature. Through the reduction of the electric-field strength, the synthesis of thick, high-quality, nitrogen-doped diamond without the formation of a polycrystalline rim around the sample edges and the twinning-induced growth of polycrystalline grains was accomplished. Therefore, a reduced internal and more homogeneous stress distribution is achieved. Furthermore, significant influences on the in situ NV doping are discovered. In addition to a considerable gain of the in situ NV generation, also a major enhancement of the in situ incorporation efficiency of NV centers in comparison to Ns0 centers up to almost 3% is observed. Depending on the application, this makes posttreatment processes for additional NV generation dispensable.
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