期刊
OPTICS EXPRESS
卷 30, 期 7, 页码 11288-11297出版社
Optica Publishing Group
DOI: 10.1364/OE.450618
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资金
- National Major Research and Development Program [2018YFB2200200, 2018YFB2200201]
- National Science Fund for Distinguished Young Scholars [61725503]
- NationalNatural Science Foundation of China [61961146003, 91950205, 92150302]
- Zhejiang Provincial Major Research and Development Program [2022C01103]
- Natural Science Foundation of Zhejiang Province [LD19F050001, LZ18F050001]
- Fundamental Research Funds for the Central Universities
In this study, a high-performance waveguide Ge/Si avalanche photodiode operating at the O-band (1310 nm) is designed and fabricated. The device shows excellent responsivity, bandwidth, and low dark current, making it suitable for future high-speed data transmission systems.
A high-performance waveguide Ge/Si avalanche photodiode operating at the O-band (1310 nm) is designed with a Ge/Si ridge waveguide defined by two shallow trenches in the active region and fabricated with simplified processes. The device shows a high primary responsivity of 0.96 A/W at the unit-gain voltage of -7.5 V. It has a large 3-dB bandwidth of >27 GHz and a low dark current of 1.8 mu A at a reverse bias voltage of -13 V. When the present Ge/Si APD is used for receiving 25 Gbps data, the eye-diagram is open even for an optical power as low as -18 dBm. Furthermore, 50 Gbps data receiving is also demonstrated with an input optical power of -15 dBm, showing the great potential of the present Ge/Si APD for the application in future high-speed data transmission systems. (C) 2022 Optica Publishing Group under the terms of the Optica Open Access Publishing Agreement
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