期刊
OPTICS AND LASERS IN ENGINEERING
卷 151, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.optlaseng.2021.106884
关键词
Femtosecond laser processing; Computer-generated hologram; Spatial light modulator; Three-dimensional parallel focusing; Feedback control
类别
资金
- Council for Science, Technology and Innovation (CSTI), Cross-ministerial Strategic Innovation Promotion Program (SIP), Photonics and Quantum Technology for Society 5.0. (Funding agency: QST)
Feedback control and computer-generated holograms enable automatic compensation for imperfections and long-term stability in parallel focusing. Demonstrating success in single-shot 3D fabrication in transparent glass proves the effectiveness of this parallel laser processing method.
We demonstrate feedback control of three-dimensional (3D) parallel focusing for automatic compensation of imperfections in an optical system and long-term stability of parallel focusing. These are realized by a computer generated hologram (CGH) displayed on a spatial light modulator (SLM), and an iterative calculation based on the observation of the 3D focusing intensities with an image sensor on a programmable linear stage. We demonstrate our parallel laser processing method using 40 parallel beams focused at four different planes, with a maximum uniformity of 0.96, applied to single-shot 3D fabrication in transparent glass.
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