期刊
OPTICAL ENGINEERING
卷 61, 期 7, 页码 -出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.OE.61.7.070903
关键词
laser damage; pulsed-laser deposition; thin films
类别
资金
- European Union's Horizon 2020 research and innovation program under the Marie Sklodowska-Curie grant [813159]
- EPSRC [EP/K009877/1, EP/K00509X/1, EP/V035975/1, EP/T517859/1, EP/N018281/1, EP/P027644/1]
The laser damage properties of dielectric sesquioxide films fabricated by pulsed-laser deposition were compared with established optical-coating materials. Results showed that the sesquioxides exhibited high laser damage thresholds, making them suitable for high-power resistant optical components for ultrashort-pulse lasers.
Dielectric sesquioxide films (Sc2O3, Y2O3, and Lu2O3) were fabricated by pulsed-laser deposition and tested in terms of their laser damage properties for pulses of 500 fs duration, at a wavelength of 1030 nm and at a 10 Hz repetition rate. Comparable tests were performed with magnetron-sputtered thin films of established optical-coating materials (SiO2, HfO2, and Nb2O5), whose results served as a benchmark. The laser-induced damage thresholds of the sesquioxides are comparable to each other, and in the multi-pulse test regime show values close to ones of HfO2 coatings. A lower damage threshold was observed for the polycrystalline Lu2O3 film grown on sapphire compared to single-crystal Lu2O3 grown on yttrium aluminium garnet (Y3Al5O12), attributed to the highly textured morphology and potential for a greater density of defect states in these films. We conclude that pulsed-laser deposition is a potential fabrication method of sesquioxides for use in high-power resistant optical components for ultrashort-pulse lasers.
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