期刊
NANOTECHNOLOGY
卷 33, 期 24, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1361-6528/ac5a81
关键词
nanostructure fabrication; subwavelength structures; optical switching devices; optical properties
资金
- Pennsylvania Department of Community and Economic Development (DCED) [C000072548]
This paper reports on the formation of moth-eye nanopillar structures on surfaces of alkali-aluminosilicate Gorilla glass substrates using a self-masking plasma etching method. The nanostructures enhance transmission at wavelengths over 525 nm and may have additional functionalities such as self-cleaning, anti-fogging, and stain-resistance.
This paper reports on the formation of moth-eye nanopillar structures on surfaces of alkali-aluminosilicate Gorilla glass substrates using a self-masking plasma etching method. Surface and cross-section chemical compositions studies were carried out to study the formation of the nanostructures. CF (x) induced polymers were shown to be the self-masking material during plasma etching. The nanostructures enhance transmission at wavelengths over 525 nm may be utilized for fluid-induced switchable haze. Additional functionalities associated with nanostructures may be realized such as self-cleaning, anti-fogging, and stain-resistance.
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