期刊
MECHANICAL SYSTEMS AND SIGNAL PROCESSING
卷 170, 期 -, 页码 -出版社
ACADEMIC PRESS LTD- ELSEVIER SCIENCE LTD
DOI: 10.1016/j.ymssp.2022.108815
关键词
Piezoelectric actuator; Stick -slip driving principle; Eliminate rollback; Precise trajectory tracking in large range; Smooth motion
资金
- National Natural Science Foundation of China [U1913215, 5210051275]
- Interdisciplinary Research Foundation of HIT [IR2021233]
- Fundamental Research Funds for Central Universities [FRFCU5710091320]
- China Postdoctoral Science Foundation [2021M690830]
This paper proposes a collaborative excitation method to improve the precise trajectory tracking performance of the piezoelectric stick-slip actuator. The experimental results show that the method can completely eliminate rollback and significantly improve motion smoothness. Furthermore, the method also achieves accurate planar tracking.
The actuators with the abilities of precise trajectory tracking in large range are widely needed in many applications. However, nearly all the previous achievements can only accomplish the integration of high precision and long stroke in the point-to-point positioning, but not the trajectory tracking. Hence, this work proposes a collaborative excitation method for the stick-slip driving principle to eliminate the rollback and improve the motion smoothness. A 2-DOF piezoelectric actuator is fabricated to verify the validity, and the theoretical models are derived to explain the driving principle. The experimental results indicate that the rollback is eliminated completely, and the motion smoothness is improved significantly. The unlimited motion range and the motion resolution higher than 3.96 nm are presented. The steady load capability is more than 15.6 times of the self-weight. Furthermore, the close-loop trajectory tracking errors are smaller than 0.13 mu m, which are less than 18.9% of the conventional excitation method. Besides, the precise planar tracking is also accomplished. To sum up, the proposed method improves the precise tracking performances of the piezoelectric stick-slip actuator significantly, and it has broad applicability on other actuators as well. Hence, it shows great prospects in the applications requiring precise trajectory tracking.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据