300 fs pulsed laser ablation of Al2O3 ceramic and introduction of a predictive model

In this study a calculation routine for predicting the ablation topography considering the angle of incidence and the evolution of the ablated surface pulse by pulse is presented and applied. Laser processing of Al2O3 ceramic is studied by the ablation of single craters as well as by macroscopic ablation pockets for a pulse duration of 300 fs at a wavelength of 515 nm. The threshold fluence is determined and compared for different process configurations and it is demonstrated that lower scanspeed leads to a higher removal rate. The accuracy of this method is evaluated in an ablation experiment. The presented method is useful for predicting the surface topography in order to optimize the scanpath or to apply machine learning algorithms. (c) 2022 The Author(s). Published by Elsevier Ltd.

Automated summary

In this study, a calculation routine for predicting the ablation topography considering the angle of incidence and pulse-by-pulse evolution of the ablated surface is presented. The laser processing of Al2O3 ceramic is investigated, and the threshold fluence is compared for different process configurations, showing that lower scanspeed leads to a higher removal rate. The method's accuracy is evaluated through an ablation experiment.