期刊
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
卷 42, 期 3, 页码 898-904出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.jeurceramsoc.2021.11.012
关键词
Aluminium nitride; Yttria-Stabilised zirconia; Thermal conductivity; Flexural strength; Ceramic substrate
资金
- Civil-Military Technology Development Project [17-CM-MA-18]
- Institute of Civil Military Technology Cooperation and Technology Innovation Program [20011003]
- Korean Ministry of Trade, Industry Energy
By optimizing the additive composition, an AlN ceramic substrate material achieved high strength and thermal conductivity, with specific additives improving sintering properties and thermal conductivity to allow sintering at a relatively low temperature. The addition of YSZ and Y2O3 enhanced strength and improved thermal properties by reacting with AlN to produce secondary phases.
The additive composition of an AlN ceramic substrate material was optimized to achieve high strength and thermal conductivity. MgO-CaO-Al2O3-SiO2 (MCAS) glass and Y2O3 were used as basic additives for improved sintering properties and thermal conductivity, thereby allowing for AlN to be sintered at a relatively low temperature of 1600 degrees C without pressurization. Yttria-stabilized zirconia (YSZ) was added (0-3 wt%) to further improve the strength of the AlN ceramic. YSZ and Y2O3 reacted with AlN to produce ZrN, Y4Al2O9, and Y3Al5O12 secondary phases. The formation of these yttrium aluminate phases improved the thermal conductivity by removing oxygen impurities, while ZrN formed at the AlN grain boundaries provided resistance to grain boundary fractures for improved strength. Overall, the AlN ceramic with 1 wt% MCAS, 3 wt% Y2O3, and 1 wt% YSZ exhibited excellent thermal and mechanical properties, including a thermal conductivity of 109 W/mK and flexural strength of 608 MPa.
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