4.6 Article

Improved barrier homogeneity in Pt/Al0.75Ga0.25N Schottky barrier diodes by graphene interlayer

期刊

出版社

IOP Publishing Ltd
DOI: 10.1088/1361-6463/ac6c5f

关键词

AlGaN; graphene; Schottky barrier diodes; Schottky barrier height

资金

  1. National Key R&D Program of China [2019YFA0708203]
  2. National Natural Science Foundation of China [61974139, 52192614, 62175228]
  3. Beijing Natural Science Foundation [4222077]

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Pt/Al0.75Ga0.25N Schottky barrier diodes (SBDs) with and without a graphene interlayer were fabricated and their electrical characteristics were analyzed. The results showed that the presence of the graphene interlayer improved the performance of the SBDs, leading to a higher barrier height and more uniform barrier distribution.
Pt/Al0.75Ga0.25N Schottky barrier diodes (SBDs) with graphene (w/Gr) and without graphene (w/o Gr) interlayer between metal and semiconductor were fabricated to determine the effects of Gr interlayer on the device electrical characteristics. The temperature dependent current-voltage (I-V) and capacitance-voltage (C-V) characteristics were systematically measured and comparably analyzed for both structures. The ideality factor (n) and Schottky barrier height (SBH) were determined by the thermionic emission model and barrier inhomogeneity model. The results reveal that the values of ideality factor varied from 4.25 to 2.5 for w/Gr SBDs and 6.61 to 3.19 for w/o Gr SBDs with a temperature range from 293 to 433 K. The mean barrier height and standard deviation values are 2.355 and 0.266 eV for w/Gr SBDs, while 2.128 and 0.272 eV for w/o Gr SBDs, respectively. The C-V data also shows the enhancement of the SBH for w/Gr SBDs. The results indicate a higher SBH and more barrier uniform distribution for w/Gr SBDs compared to w/o Gr SBDs, contributing to a quality improvement of Schottky contact. The insights granted by this research may pave a new pathway for improving the performance of AlGaN SBDs through Gr engineering.

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