期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 31, 期 3, 页码 473-480出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2022.3163281
关键词
Glass; Chemicals; Etching; Microfabrication; Hafnium; Fabrication; Corrosion; Micro fabrication; microfluidics; tapered glass capillary; chemical etching; mechanical polishing
类别
资金
- National Natural Science Foundation of China [51505123, 51728502]
- Fund for Distinguish Young Scholars, Tianjin [2018-3rd]
- Hebei Science and Technology Foundation [19271707D]
- Natural Science Foundation of Hebei Province [E2020202101, E2022202127, F2021202001]
- Department of Human Resources and Social Security of Hebei [C20200314, C20210337]
- Jiangsu Key Laboratory of Advanced Food Manufacturing Equipment and Technology [FMZ202016]
This study presents a reliable microfabrication method for producing tapered glass capillaries using a combination of chemical etching and mechanical polishing. The method offers advantages in terms of size control and surface quality, making it highly promising for the microfabrication of glass capillary devices.
Micro fabrication of tapered glass capillaries with on-demand geometry is one of the essential issues to make specific devices for electrophysiological experiments, microfluidics, pharmaceutics. Capitalizing on chemical etching and mechanical polishing, we have developed a reliable microfabrication method to make tapered glass capillaries with on-demand size. The tip ending diameter reaches from several microns to hundreds of microns within one hour fabrication time, which can meet the requirement for microfabrication of microfluidic devices. To demonstrate the performance of the hybrid microfabrication method, the effect of etching time, and etchant concentrations are proposed. Furthermore, the surface quality of fabricated device is demonstrated to show the advantages of our microfabrication method. Then two typical applications such as the soft manipulation of zebrafish embryo and the production of emulsion droplets are performed. This hybrid microfabrication method of chemical etching combined with mechanical polishing shows great advantages to obtain on-demand size of tapered glass capillaries, and these features make it highly promising for microfabrication of glass capillary devices. [2021-0229]
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