期刊
JOURNAL OF CRYSTAL GROWTH
卷 593, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.jcrysgro.2022.126750
关键词
A1; Growth models; Heat transfer; Computer simulation; Validation; Model experiment; A2; Czochralski method
资金
- European Research Council (ERC) under the European Union [851768]
- European Research Council (ERC) [851768] Funding Source: European Research Council (ERC)
The Czochralski process is an important technique for producing bulk single crystals. A new 2D open-source thermal CZ growth model is introduced in this study, which is verified and validated using analytical solutions and dedicated model experiments. The model considers gas and melt convection and successfully predicts the influence of crystal pull velocity and melt temperature on crystal diameter.
The Czochralski (CZ) process is one of the most important techniques for the production of bulk single crystals. Various numerical models for CZ growth furnaces exist, however, a review of the recent literature demonstrates that their validation is often questionable due to missing in-situ measurement data. In this work, a new 2D opensource thermal CZ growth model is introduced, verified with analytical solutions, and validated using dedicated model experiments with tin and hence easy access for the required measurements. A three-step procedure is applied to identify critical modeling parameters, make adjustments of these parameters, and evaluate the resulting modeling accuracy. Gas and melt convection, modeled with heat transfer coefficients and an effective heat conductivity, are found to be crucial and are adjusted using experimental data. Comparison of measured temperatures in the crucible shows good agreement, with deviations of max. 0.3 / 1.3 K under natural / forced convection. The model is able to predict the influence of crystal pull velocity and melt temperature on crystal diameter qualitatively.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据