4.6 Article

Atomic-scale investigation of implanted Mg in GaN through ultra-high-pressure annealing

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Physics, Applied

Effect of annealing time and pressure on electrical activation and surface morphology of Mg-implanted GaN annealed at 1300 °C in ultra-high-pressure nitrogen ambient

Kensuke Sumida et al.

Summary: Isothermal annealing of Mg-implanted GaN at 1300 degrees C in an ultra-high-pressure (1 GPa) nitrogen ambient resulted in high acceptor activation ratio and low compensation ratio. Annealing at reduced nitrogen pressure of 300 MPa also achieved high electrical activation similar to that obtained at 1 GPa.

APPLIED PHYSICS EXPRESS (2021)

Article Physics, Condensed Matter

Effects of Dosage Increase on Electrical Properties of Metal-Oxide-Semiconductor Diodes with Mg-Ion-Implanted GaN Before Activation Annealing

Masamichi Akazawa et al.

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS (2020)

Article Physics, Applied

Redistribution of Mg and H atoms in Mg-implanted GaN through ultra-high-pressure annealing

Hideki Sakurai et al.

APPLIED PHYSICS EXPRESS (2020)

Article Physics, Applied

Influence of implanted Mg concentration on defects and Mg distribution in GaN

Ashutosh Kumar et al.

JOURNAL OF APPLIED PHYSICS (2020)

Review Computer Science, Information Systems

High Pressure Processing of Ion Implanted GaN

Kacper Sierakowski et al.

ELECTRONICS (2020)

Article Physics, Applied

Cathodoluminescene study of Mg implanted GaN: the impact of dislocation on Mg diffusion

Jun Chen et al.

APPLIED PHYSICS EXPRESS (2019)

Article Physics, Applied

Highly effective activation of Mg-implanted p-type GaN by ultra-high-pressure annealing

Hideki Sakurai et al.

APPLIED PHYSICS LETTERS (2019)

Article Physics, Condensed Matter

Carrier Trapping by Vacancy-Type Defects in Mg-Implanted GaN Studied Using Monoenergetic Positron Beams

Akira Uedono et al.

PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS (2018)

Review Physics, Applied

The 2018 GaN power electronics roadmap

H. Amano et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2018)

Article Physics, Applied

P-type doping of GaN(000(1)over-bar) by magnesium ion implantation

Tetsuo Narita et al.

APPLIED PHYSICS EXPRESS (2017)

Article Physics, Applied

High carrier activation of Mg ion-implanted GaN by conventional rapid thermal annealing

Takaki Niwa et al.

APPLIED PHYSICS EXPRESS (2017)

Article Engineering, Electrical & Electronic

GaN Technology for Power Electronic Applications: A Review

Tyler J. Flack et al.

JOURNAL OF ELECTRONIC MATERIALS (2016)

Article Engineering, Electrical & Electronic

Vertical Power p-n Diodes Based on Bulk GaN

Isik C. Kizilyalli et al.

IEEE TRANSACTIONS ON ELECTRON DEVICES (2015)

Article Physics, Multidisciplinary

Shallow versus Deep Nature of Mg Acceptors in Nitride Semiconductors

John L. Lyons et al.

PHYSICAL REVIEW LETTERS (2012)

Article Microscopy

Atomic-resolution defect contrast in low angle annular dark-field STEM

P. J. Phillips et al.

ULTRAMICROSCOPY (2012)

Article Microscopy

Sample preparation for atomic-resolution STEM at low voltages by FIB

Miroslava Schaffer et al.

ULTRAMICROSCOPY (2012)

Article Microscopy

In situ site-specific specimen preparation for atom probe tomography

K. Thompson et al.

ULTRAMICROSCOPY (2007)

Review Instruments & Instrumentation

Invited review article: Atom probe tomography

Thomas F. Kelly et al.

REVIEW OF SCIENTIFIC INSTRUMENTS (2007)

Article Engineering, Electrical & Electronic

Electrical and optical activation studies of Si-implanted GaN

JA Fellows et al.

JOURNAL OF ELECTRONIC MATERIALS (2005)

Article Physics, Applied

Electrical activation characteristics of silicon-implanted GaN

Y Irokawa et al.

JOURNAL OF APPLIED PHYSICS (2005)