Integration and Characterization of LiTaO3 Single Crystal Film Pyroelectric Sensor Using Mid-Infrared Metamaterial Perfect Absorber

An infrared sensor with Au/SiO2/Au metamaterial perfect absorber (MPA) structure and Crystal ion slicing (CIS) fabricated LiTaO3 single crystal film to realize wavelength-selective function was proposed and fabricated in this paper. The Au/SiO2/Au multilayer MPA exhibited outstanding wavelength selectivity at 4.04 mu m with a maximum absorbance of 98% and the spectral voltage response of sensor highly agreed with it. Meanwhile, the sensor performed stable angle independency with radiation incident angle from 0 degrees to 50 degrees. After integration, this sensor showed maximum voltage responsivity of 1.7 x 10(4)V/W, maximum detectivity of 1.7 x 10(8) cmHz(1/2)/W, and 5.8ms response time. These results demonstrate the promising application prospect of high specific and fast response pyroelectric infrared sensor achieved by integrating MPA with LiTaO3 thin film.

Automated summary

This paper proposes and fabricates an infrared sensor with wavelength-selective function by integrating MPA and LiTaO3 thin film, which exhibits high specificity and fast response.