4.4 Article

Optimization of a vibrating MEMS electromagnetic energy harvester using simulations

期刊

EUROPEAN PHYSICAL JOURNAL-SPECIAL TOPICS
卷 231, 期 24, 页码 4205-4211

出版社

SPRINGER HEIDELBERG
DOI: 10.1140/epjs/s11734-022-00577-8

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资金

  1. French national project POMADE [ANR 19-CE09-0021-01]
  2. EUR grant NanoX [ANR-17-EURE-0009]
  3. Region Occitanie (AimCap)
  4. Region Occitanie
  5. Universite Federale de Toulouse

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Wireless sensor networks are becoming increasingly important in our daily lives, but energy supply remains a major constraint. Harvesting mechanical energy to replace batteries is an alternative solution. Using finite element simulations, we provide a complete guideline for optimizing the design of a MEMS electromagnetic energy harvester.
Nowadays, wireless sensor networks (WSN) are becoming essential in our daily life. However, a major constraint concerns the energy power supply. Indeed, batteries need to be recharged or replaced often which implies a limited lifetime for WSN nodes. One alternative consists in harvesting mechanical energy from surrounding vibrations of the environment. Using finite element simulations, we report here a complete guideline to optimize a MEMS electromagnetic energy harvester consisting of an in-plane vibrating silicon frame supporting an array of micromagnets that faces a static 2D micro-coil. The dimensioning of the magnet array and the specific design of the coil are addressed, considering patterned 50 mu m thick NdFeB films with out of plane magnetization. The optimization of the electromechanical coupling which allows to efficiently convert the energy results from a trade-off between the high magnetic flux gradients produced by the micromagnets and the maximum number of turns of the facing coil.

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