期刊
APPLIED SURFACE SCIENCE
卷 588, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2022.152963
关键词
SiC; Friction; Removal mechanism; Chemical reaction; Iron; Nickel
类别
资金
- Ministry of Education Inno-vation Team [IRT_17R41]
- National Natural Science Foundation of China [51375179]
- Major Science and Technology Project of Xiamen City [3502ZCQ20191007]
The high-speed friction-induced removal behavior of single crystal silicon carbide (4H-SiC) by pure metals (iron and nickel) was investigated in this study. The subsurface damage of SiC substrates on both C-face and Si-face was explored. It was found that the C-face SiC substrate had almost no damage, while crystal defects were evidenced on the Si-face SiC substrate. The material removal rate was highest on the Si-face using pure nickel. The formation of silicide and/or oxide indicated that the material removal of both the C-face and Si-face of 4H-SiC was dominated by the friction-induced chemical interaction. A friction reaction-removal model of single crystal 4H-SiC substrate using pure metal was proposed.
High speed friction induced removal behavior of single crystal silicon carbide (4H-SiC) by pure metals (iron and nickel) were investigated, and the subsurface damage were explored for both C-face and Si-face of SiC substrates. A near damage-free subsurface was obtained for C-face SiC substrate. Crystal defects including cracks, disloca-tions, stacking faults and lattice distortions were evidenced for Si-face SiC substrate. The highest material removal rate (MRR) was found to be 8.9 gm/min on Si-face using pure nickel. The formation of silicide and/or oxide indicated that the material removal of C-face and Si-face of 4H-SiC were both dominated by the friction -induced chemical interaction. A friction reaction-removal model of single crystal 4H-SiC substrate using pure metal was also proposed in this paper.
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