4.7 Article

Transformation of the elemental composition on the GaN surface during a 2D-3D transition

期刊

APPLIED SURFACE SCIENCE
卷 577, 期 -, 页码 -

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ELSEVIER
DOI: 10.1016/j.apsusc.2021.151802

关键词

GaN quantum dots; Surface processes; Reflection high-energy electron diffraction; Molecular beam epitaxy

资金

  1. Ministry of Science and Higher Education of the Russian Federation [075-15-2020-797 (13.1902.21.0024)]

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The transformation of a two-dimensional elastically strained GaN layer on the AlN surface into GaN quantum dots after switching off the ammonia flow at different temperatures was studied. It was observed that a reverse 3D-2D transition occurs after a forward 2D-3D transition. The changes in elemental composition and surface energy of GaN after switching off the ammonia were calculated, showing that the transitions are explained by the non-monotonic behavior of surface energy.
The transformation of a two-dimensional elastically strained GaN layer on the AlN surface into GaN quantum dots (forward 2D-3D transition) after switching off the ammonia flow at different temperatures was investigated by reflection high-energy electron diffraction method. It was found that after a forward 2D-3D transition, a reverse 3D-2D transition occurs, the quantum dots are transformed into an elastically strained two-dimensional layer. The change in the elemental composition and surface energy of GaN after switching off the ammonia is calculated. It is shown that the forward and reverse 2D <-> 3D transitions are explained by the non-monotonic behavior of the surface energy due to the competition between two processes: desorption of NH2 and H particles and the movement and fixation of NH2, NH, and N particles to energetically more favorable positions on the GaN surface.

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