期刊
APPLIED SURFACE SCIENCE
卷 578, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2021.151995
关键词
Monocrystalline diamond; Highly oriented graphite; Phase transformation; Ultraviolet nanosecond pulsed laser; Molecular dynamics simulation
类别
资金
- National Natural Science Foundation of China [52005464, 51875119]
- Science Challenge Project [TZ2018006-0201-02, TZ2018006-0205-02]
- Sichuan Science and Technology Program [2020YFG0017]
- Fundamental Research Funds for the Central Universities
This study focuses on inducing highly oriented graphite layer in diamond by laser ablation to enhance the electronic functionalities of monocrystalline diamond. Microgrooves with high precision and limited heat affected zone are fabricated on monocrystalline diamond using low cost ultraviolet nanosecond pulsed laser micromachining. A highly oriented graphite layer is formed between the top transformed amorphous layer and bottom pristine diamond, with visible regular boundaries among them.
Inducing highly oriented graphite layer as buried conductive media in diamond by laser ablation is crucial for promoting the electronic functionalities of structured monocrystalline diamond. In the present work, we fabri-cate surface microgrooves with high precision and limited heat affected zone on monocrystalline diamond by low cost ultraviolet nanosecond pulsed laser micromachining. In particular, fruitful highly oriented graphite layer is formed between top transformed amorphous layer and bottom pristine diamond, with visible regular boundaries among them. Raman spectroscopy and high-resolution transmission electron microscopy characterization are jointly utilized to identify the phase transformation-induced microstructure evolution in subsurface of ablated diamond. Furthermore, molecular dynamics simulations are performed to elucidate the underlying ablation mechanisms, as well as predict the dynamic ablation process of nanosecond pulsed laser micromachining of diamond. Finally, the effect of laser fluence on the machined surface morphology and the phase transformation characteristics of the ablated diamond is addressed.
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