4.7 Article

Band alignment of ultrawide bandgap e-Ga2O3/h-BCN heterojunction epitaxially grown by metalorganic chemical vapor deposition

期刊

APPLIED SURFACE SCIENCE
卷 583, 期 -, 页码 -

出版社

ELSEVIER
DOI: 10.1016/j.apsusc.2022.152502

关键词

Band alignment; Epsilon gallium oxide; Hexagonal boron carbonitride; Heterojunction

资金

  1. Natural Science Foundation Key Project of Jiangxi Province, China [20202ACBL202001]
  2. Key Laboratory Construction Project of Nanchang [2020-NCZDSY-008]
  3. Jiangxi Province Double Thousand Plan [S2019CQKJ2638]
  4. Natural Science Foundation of Jiangsu Province, China [BK20191195]
  5. National Natural Science Foundation of China [U1830112]

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In this work, ultrawide bandgap epsilon-Ga2O3/h-BCN heterojunctions were epitaxially grown on sapphire substrates by metalorganic chemical vapor deposition (MOCVD). The heterojunction was systematically studied by various material characterization techniques, revealing a clear interface and specific band alignment. This work provides valuable information on the epitaxial growth and band alignment of the heterojunction, expanding its potential in electronic and photonic applications.
In this work, ultrawide bandgap epsilon-Ga2O3/h-BCN heterojunctions were epitaxially grown on sapphire substrates by metalorganic chemical vapor deposition (MOCVD). This heterojunction was systematically studied by various material characterization techniques, including X-ray diffraction (XRD), atomic force microscope (AFM), transmission electron microscopy (TEM), high-resolution X-ray photoelectron spectroscopy (HR-XPS), energy dispersive spectroscopy (EDS), and UV-Vis-NIR spectroscopy. h-BCN conformed to a two-dimensional layered structure, while epsilon-Ga2O3 grown on h-BCN was found to be polycrystalline. TEM and EDS element mapping showed a clear and sharp interface of the heterojunction. HR-XPS measurements were carried out to unveil the band alignment of the epsilon-Ga2O3/h-BCN heterojunction. It was found that the epsilon-Ga2O3/h-BCN heterojunction exhibits a type-II band alignment with a conduction band offset of 2.77 eV and a valence band offset of 1.60 eV. This work provides valuable information on the epitaxial growth and band alignment of the ultrawide bandgap epsilon-Ga2O3/h-BCN heterojunctions, opening the door to a myriad of electronic and photonic applications.

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