期刊
APPLIED PHYSICS EXPRESS
卷 15, 期 7, 页码 -出版社
IOP Publishing Ltd
DOI: 10.35848/1882-0786/ac6e28
关键词
silicon nitride; STEM; EELS; bandgap; subgap excitation
We observed the nanoscale distribution of subgap excitations induced by Ga-ion beam processing in beta-Si3N4 using electron energy-loss spectroscopy. By combining crystallinity, composition, and bandgap measurements, we found that defects excited at different energy levels exhibit different dependence trends with respect to crystallinity. This proposed technique can effectively distinguish between various amorphous materials.
We observed nanoscale distribution of subgap excitations induced by Ga-ion beam processing in beta-Si3N4 via electron energy-loss spectroscopy performed using a monochromated (0.1 eV) and aberration-corrected scanning transmission electron microscope. A sufficiently low operating voltage (30 kV) was selected to suppress background caused by Cerenkov loss in beta-Si3N4 with a high refractive index. By further combining crystallinity, composition, and bandgap measurements, we found that defects excited at the band edge (6 eV) and lower energies (3 eV) exhibit different dependence trends with respect to crystallinity. The proposed technique was verified to effectively distinguish between various amorphous materials.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据