期刊
APPLIED PHYSICS B-LASERS AND OPTICS
卷 128, 期 3, 页码 -出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00340-022-07782-2
关键词
-
资金
- Projekt DEAL
This study reports on a hybrid laser scanning system that combines acousto-optical deflectors with galvanometer scanners for ultra-short pulse laser material processing. The system exhibits high ablation roundness and positioning speed, enabling highly dynamic and extremely precise laser beam positioning in a large processing area.
We report on the characterization of a hybrid laser scanning system using acousto-optical deflectors in combination with galvanometer scanners for ultra-short pulse laser material processing. The hybrid scanning system is characterized by the roundness of static pulsed ablations of metal thin film on a transparent substrate within the acousto-optical scanning field at different galvanometer scanner deflection angles and laser focal positions. An ablation roundness of more than 90% is reached in a defocusing range of 200 mu m within a galvanometer scanfield of 900 mm(2), corresponding to approximately 74% of the usable scan area of thef-theta lens. A high maximum positioning speed of 843 m/s is pointed out within an acousto-optical scanfield of 0.4 mm(2) by applying positioning frequencies of up to 1 MHz across a distance of 843 mu m Consequently, the hybrid scanning system combines the advantages of optical and mirror-based scanners, enabling a highly dynamic and extremely precise laser beam positioning in a large processing area.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据