4.8 Article

In Situ Laser Fabrication of Polymer-Derived Ceramic Composite Thin-Film Sensors for Harsh Environments

期刊

ACS APPLIED MATERIALS & INTERFACES
卷 14, 期 10, 页码 12652-12661

出版社

AMER CHEMICAL SOC
DOI: 10.1021/acsami.1c24628

关键词

polymer-derived ceramics; laser pyrolysis; thin film; strain sensor; nickel alloys

资金

  1. National Natural Science Foundation of China [62101469]
  2. 2020 externally commissioned project of Sichuan Gas Turbine Research Institute of AECC [GJLZ-2020-0059]
  3. 2020 externally commissioned project of Shenyang Aero Engine Research Institute of AECC [JC3602007026]

向作者/读者索取更多资源

This study proposes a novel method of rapid in situ fabrication of polymer-derived ceramic (PDC) composite thin-film sensors by laser pyrolysis, which can quickly obtain a sensitive PDC composite film layer with high-quality graphite and is more flexible and efficient compared to traditional furnace thermolysis. The reaction differences between laser pyrolysis and furnace thermolysis are also analyzed. The approach pioneers the in situ laser fabrication of functional PDC films for sensors and shows great potential for in situ sensing of complex curved surfaces in harsh environments.
Polymer-derived ceramic (PDC) is considered an excellent sensing material for harsh environments such as aero-engines and nuclear reactors. However, there are many inherent limitations not only in pure PDC but also in its common fabrication method by furnace thermolysis. Therefore, this study proposes a novel method of rapid in situ fabrication of PDC composite thin-film sensors by laser pyrolysis. Using this method with different fillers, a sensitive PDC composite film layer with high-quality graphite can be obtained quickly, which is more flexible and efficient compared to the traditional furnace thermolysis. Furthermore, this study analyzes the reaction differences between laser pyrolysis and furnace thermolysis. The laser pyrolysis method principally produces beta-SiC and enhances the graphitization of amorphous carbon, while the degree of graphitization by furnace thermolysis is low. In addition, it is capable of rapidly preparing an insulating PDC composite film, which still has a resistance of 5 M Omega at 600 degrees C. As a proof of this method, the PDC composite thin-film strain sensors are fabricated in situ on nickel alloys and aluminum oxide substrates, respectively. The sensor fabricated on the nickel alloy with a high gauge factor of over 100 can be used in high-temperature environments below 350 degrees C without the protection of an oxidation-resistant coating. In this way, the approach pioneers the in situ laser fabrication of functional PDC films for sensors, and it has great potential for the in situ sensing of complex curved surfaces in harsh environments.

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