期刊
MATERIALIA
卷 20, 期 -, 页码 -出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.mtla.2021.101207
关键词
Orientation imaging microscopy (OIM); eCHORD; Electron backscattering diffraction (EBSD); Low voltage SEM; Ceramics; Metal and alloys
资金
- Agence Nationale pour la Recherche [ANR-16-CE08-0006 BICUIT, DS0303-2016]
- French Ministry of Higher Education and Research
- Agence Nationale de la Recherche (ANR) [ANR-16-CE08-0006] Funding Source: Agence Nationale de la Recherche (ANR)
This study successfully demonstrated orientation mapping at an accelerating voltage lower than 5 kV for the first time, and confirmed that the 1 kV eCHORD method showed good agreement with the 15 kV EBSD method in texture measurements of the sample. Potential issues associated with using such a low accelerating voltage for eCHORD measurements were also discussed.
Orientation mapping using Electron Back Scattered Diffraction (EBSD) is limited in its spatial resolution by the acceleration voltage, usually higher than 5 kV. In the present work, we present for the first time an orientation mapping at 1 kV obtained by the eCHORD approach (electron CHanneling ORientation Determination) on a lamellar bio-inspired alumina sample. Texture results extracted from the 1 kV eCHORD mapping are in very good agreement with texture measurements obtained by EBSD at 15 kV on the same sample. Potential issues associated to such a low accelerating voltage for eCHORD measurements are discussed.
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