期刊
ELECTRONICS
卷 10, 期 20, 页码 -出版社
MDPI
DOI: 10.3390/electronics10202472
关键词
III-V semiconductors; modeling and simulation; Monte Carlo
资金
- European Commission III-V-MOS project via the IUNET consortium [619326]
The multi-valley/multi-subband Monte Carlo approach is used to model nanoscale MOSFETs with III-V semiconductors as channel materials. This approach considers carrier quantization and off-equilibrium transport, and can be applied for III-V channel MOSFET variability studies. Model verification is done through comparison with other methods, and calibration for TCAD simulation is also demonstrated.
We describe the multi-valley/multi-subband Monte Carlo (MV-MSMC) approach to model nanoscale MOSFETs featuring III-V semiconductors as channel material. This approach describes carrier quantization normal to the channel direction, solving the Schrodinger equation while off-equilibrium transport is captured by the multi-valley/multi-subband Boltzmann transport equation. In this paper, we outline a methodology to include quantum effects along the transport direction (namely, source-to-drain tunneling) and provide model verification by comparison with Non-Equilibrium Green's Function results for nanoscale MOSFETs with InAs and InGaAs channels. It is then shown how to use the MV-MSMC to calibrate a Technology Computer Aided Design (TCAD) simulation deck based on the drift-diffusion model that allows much faster simulations and opens the doors to variability studies in III-V channel MOSFETs.
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