期刊
ELECTRONICS
卷 10, 期 24, 页码 -出版社
MDPI
DOI: 10.3390/electronics10243146
关键词
dopamine; platinum membrane; N-2; O-2 annealing; Schottky contact; CV characteristics
资金
- Ministry of Science and Technology (MOST) Taiwan [MOST-105-2221-E-182-002, MOST-110-2221-E-182-061]
The study investigates dopamine detection using N-2/O-2 annealing in a Pt/Ti/n-Si structure, achieving stable detection of low concentrations of dopamine through optimization of the Pt membrane and thickness, which is significant for early diagnosis of Parkinson's disease in the future.
Dopamine detection by using N-2/O-2 annealing in a Pt/Ti/n-Si structure is investigated for the first time. To achieve repeatable and stable dopamine detection, a Pt membrane is annealed at elevated temperatures of 500 to 700 degrees C. N-2/O-2 gas ambient is used to optimize the membrane. The Pt membrane with thicknesses from 5 to 2 nm is optimized. Novel Pt/Ti/n-Si Schottky contact in a metal-electrolyte-membrane-silicon (MEMS) structure detects dopamine with a low concentration of 1 pM. The Pt membrane with N-2 ambient annealing shows the lowest concentration of dopamine sensing with a small volume of 10 mu L, acceptable stability, and repeatability. Scan rate-dependent dopamine concentration sensing is also investigated in the two-terminal measurement method. This study is useful for the early diagnosis of Parkinson's disease in the near future.
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