期刊
COATINGS
卷 11, 期 11, 页码 -出版社
MDPI
DOI: 10.3390/coatings11111342
关键词
TixZr1-xN hard film; Zr/(Zr plus Ti) molar ratio; phase structure; preferred growth orientation; hardness
资金
- Liaoning Province Doctor Start-up Fund [2021-BS-276]
Controlling the Zr/(Zr+Ti) molar ratio affected the phase composition, growth orientation, and hardness of TixZr1-xN films. According to the analysis results from the Chinese and English data, two hardness peak values were observed at Zr/Ti molar ratios of 40:60 and 60:40 respectively.
TixZr1-xN hard films with Zr/(Zr+Ti) molar ratios from 20% to 80% were prepared by multi-arc ion plating using any two of elemental Ti, elemental Zr, and TiZr alloy targets. The as-deposited TixZr1-xN films displayed similar surface and fracture cross-section morphologies and thicknesses. The effects of Zr/(Zr+Ti) molar ratio on the phase composition, preferred growth orientation, and hardness of the films were discussed. The results showed that the as-deposited films had a face-centered cubic structure and exhibited the typical characteristics of substitutional solid solutions. The lattice constant of the films increased monotonically with increasing Zr/(Zr+Ti) molar ratio. Two preferred growth orientations, corresponding to the two hardness peak values, occurred symmetrically at Zr/Ti molar ratios of 40:60 and 60:40. An inflection point with a small reduction in hardness was observed at the Zr/Ti molar ratio of 50:50.
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