期刊
CRYSTALS
卷 12, 期 1, 页码 -出版社
MDPI
DOI: 10.3390/cryst12010078
关键词
hafnium nitride; reactive gas timing; sputtering; surface-enhanced Raman spectroscopy
资金
- National Research Council of Thailand (NRCT) [2564NRCT322246]
- National Science and Technology Development Agency (NSTDA) [P2150364]
This study successfully demonstrated the tailoring properties of HfN thin films via reactive gas-timing RF magnetron sputtering for SERS substrate applications. The RGT technique can fabricate HfN thin films with controlled properties, such as grain size and chemical composition, resulting in an increase in the hot spot effect.
This study successfully demonstrated the tailoring properties of hafnium nitride (HfN) thin films via reactive gas-timing (RGT) RF magnetron sputtering for surface-enhanced Raman spectroscopy (SERS) substrate applications. The optimal RGT sputtering condition was investigated by varying the duration time of the argon and nitrogen gas sequence. The RGT technique formed thin films with a grain size of approximately 15 nm. Additionally, the atomic ratios of nitrogen and hafnium can be controlled between 0.24 and 0.28, which is greater than the conventional technique, resulting in a high absorbance in the long wavelength region. Moreover, the HfN thin film exhibited a high Raman signal intensity with an EF of 8.5 x 10(4) to methylene blue molecules and was capable of being reused five times. A superior performance of HfN as a SERS substrate can be attributed to its tailored grain size and chemical composition, which results in an increase in the hot spot effect. These results demonstrate that the RGT technique is a viable method for fabricating HfN thin films with controlled properties at room temperature, which makes them an attractive material for SERS and other plasmonic applications.
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