期刊
APL MATERIALS
卷 9, 期 11, 页码 -出版社
AIP Publishing
DOI: 10.1063/5.0070046
关键词
-
资金
- EPSRC
- SFI Centre for Doctoral Training in Advanced Characterisation of Materials [EP/L015277/1]
- Royal Academy of Engineering
- EPSRC [1917855] Funding Source: UKRI
The article introduces a new nanoscale analysis method, which observes the movement of oxygen in ReRAM devices using secondary ion mass spectrometry, revealing details of oxygen exchange in the stack, including the reservoir-like behavior of Mo electrodes and the injection of oxygen. Controlling oxygen injection is possible by changing the porosity of the SiOx layer.
The limited sensitivity of existing analysis techniques at the nanometer scale makes it challenging to systematically examine the complex interactions in redox-based resistive random access memory (ReRAM) devices. To test models of oxygen movement in ReRAM devices beyond what has previously been possible, we present a new nanoscale analysis method. Harnessing the power of secondary ion mass spectrometry, the most sensitive surface analysis technique, for the first time, we observe the movement of O-16 across electrically biased SiOx ReRAM stacks. We can therefore measure bulk concentration changes in a continuous profile with unprecedented sensitivity. This reveals the nanoscale details of the reversible field-driven exchange of oxygen across the ReRAM stack. Both the reservoir-like behavior of a Mo electrode and the injection of oxygen into the surface of SiOx from the ambient are observed within one profile. The injection of oxygen is controllable through changing the porosity of the SiOx layer. Modeling of the electric fields in the ReRAM stacks is carried out which, for the first time, uses real measurements of both the interface roughness and electrode porosity. This supports our findings helping to explain how and where oxygen from ambient moisture enters devices during operation. (c) 2021 Author(s). All article content, except where otherwise noted, is licensed under a Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/). https://doi.org/10.1063/5.0070046
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据