期刊
ACS PHOTONICS
卷 8, 期 12, 页码 3433-3439出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsphotonics.1c00608
关键词
photonic nanoantenna; optical phased array; multilayer photonics; silicon photonics; silicon nitride; grating structures
类别
资金
- Defense Advanced Research Projects Agency MOABB Program [FA8650-18-1-7828]
- National Aeronautics and Space Administration ESI Program [80NSSC19K0214]
A novel multilayer 2-D optical phased array technology is introduced in this study, achieving a record element-pitch and a wide steering range through special designs.
Two-dimensional optical beam-steering with applications in LiDAR, projection, imaging, and communication is performed using either a 2-D optical phased array (OPA) with per-element optical phase control or a 1-D OPA with a combination of phase control and wavelength tuning. The former typically suffers from a high power consumption and a large element-spacing, and the latter requires a highly tunable laser and is incompatible with certain 2-D beam-steering applications such as communication. In either case, achieving subwavelength element-spacing is challenging due to the large size of devices compared to the operation wavelength. Here, we report a single-wavelength multilayer 2-D OPA, where a beam is formed through near-field interference of waves emitted from array elements on each layer. Vertically aligned tilted optical nanoantennas, 3-D optical signal distribution, and off-aperture phase control enable the realization of a record element-pitch of 3 mu m. The 64-element 2-D OPA achieves a steering range of 23 degrees using only 16 phase shifters.
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