期刊
MICROMACHINES
卷 12, 期 12, 页码 -出版社
MDPI
DOI: 10.3390/mi12121515
关键词
AM demodulator; microelectromechanical systems (MEMS); capacitive; thermoelectric
类别
资金
- National Natural Science Foundation of China [NSFC: 61904030, NSFC: 61974023]
- Jiangsu Natural Science Foundation [BK20201233]
This paper proposes an amplitude demodulator with a large dynamic range based on MEMS technology, utilizing a cascade of capacitive and thermoelectric sensors to demodulate AM signals with carrier frequencies ranging from 0.35 to 10 GHz. The device has high power handling capability and zero DC power consumption.
An amplitude demodulator with a large dynamic range, based on microelectromechanical systems (MEMS), is proposed in this paper. It is implemented as a cascade of a capacitive and a thermoelectric sensor. Two types of the transducer can improve the measurement range and enhance the overload capacity. This MEMS-based demodulation is realized by utilizing the square law relationship and the low-pass characteristic during the electromechanical and thermoelectric conversion. The fabrication of this device is compatible with the GaAs monolithic microwave integrated circuit (MMIC) process. Experiments show that this MEMS demodulator can realize the direct demodulation of an amplitude modulation (AM) signal with a carrier frequency of 0.35-10 GHz, and cover the power range from 0 to 23 dBm. This MEMS demodulator has the advantages of high power handling capability and zero DC power consumption.
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