4.6 Article

Scanning Probe Lithography: State-of-the-Art and Future Perspectives

期刊

MICROMACHINES
卷 13, 期 2, 页码 -

出版社

MDPI
DOI: 10.3390/mi13020228

关键词

nanofabrication; scanning probe lithography (SPL); scanning probe microscopy (SPM); nanostructures

资金

  1. EPSRC [EP/K018345/1, EP/T024844/1, EP/V055208/1]
  2. International Cooperation Program of China [2015DFA70630]
  3. Royal Society-NSFC International Exchange scheme [IEC\NSFC\181474]
  4. Science and Technology Based for Equipment Design and Manufacturing for Introduction Talents of Discipline to Universities
  5. 111 project [BP0719002, EP/L016567/1, EP/S013652/1, EP/S036180/1, EP/T024607/1]
  6. Transforming the Foundation Industries NetworkPlus feasibility study award [EP/V026402/1]
  7. Royal Academy of Engineering [IAPP18-19\295, TSP1332, EURAMET EMPIR A185 (2018)]
  8. Alliance Hubert-Curien Mobility award from the British Council
  9. Newton Fellowship award from the Royal Society [NIF\R1\191571]

向作者/读者索取更多资源

This article presents the mechanism, current research, and application characteristics of scanning probe lithography (SPL) nanofabrication technique, and analyzes the effects of thermal, chemical, electric, and magnetic fields on this technology. The article also compares different fabrication capabilities, throughput, and attainable resolution, and points out that SPL has yet to achieve its full commercial potential.
High-throughput and high-accuracy nanofabrication methods are required for the ever-increasing demand for nanoelectronics, high-density data storage devices, nanophotonics, quantum computing, molecular circuitry, and scaffolds in bioengineering used for cell proliferation applications. The scanning probe lithography (SPL) nanofabrication technique is a critical nanofabrication method with great potential to evolve into a disruptive atomic-scale fabrication technology to meet these demands. Through this timely review, we aspire to provide an overview of the SPL fabrication mechanism and the state-the-art research in this area, and detail the applications and characteristics of this technique, including the effects of thermal aspects and chemical aspects, and the influence of electric and magnetic fields in governing the mechanics of the functionalized tip interacting with the substrate during SPL. Alongside this, the review also sheds light on comparing various fabrication capabilities, throughput, and attainable resolution. Finally, the paper alludes to the fact that a majority of the reported literature suggests that SPL has yet to achieve its full commercial potential and is currently largely a laboratory-based nanofabrication technique used for prototyping of nanostructures and nanodevices.

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