期刊
MATERIALS
卷 15, 期 2, 页码 -出版社
MDPI
DOI: 10.3390/ma15020410
关键词
co-doped zirconia; zirconia-doped thin films; pulsed laser deposition; solid electrolyte; XPS
类别
资金
- Department of Science and Technology-Engineering Research and Development for Technology (DOST-ERDT) Scholarship
- Science Education Institute (DOST-SEI)
- WPI-MANA National Institute for Materials Science (NIMS), Tsukuba, Japan
- Commission on Higher Education (CHED) through the Philippine-California Advanced Research Institute research project [PCARI IIID-2015-009]
In this study, ScYSZ thin films were prepared on a SiO2-Si substrate using the pulsed laser deposition method, and the effects of different oxygen partial pressures and substrate temperatures on the film properties were investigated. The results showed that cubic polycrystalline films were obtained at higher oxygen partial pressures and substrate temperatures, while amorphous films were formed at lower oxygen partial pressures and substrate temperatures.
Scandium (Sc) and yttrium (Y) co-doped ZrO2 (ScYSZ) thin films were prepared on a SiO2-Si substrate via pulsed laser deposition (PLD) method. In order to obtain good quality thin films with the desired microstructure, various oxygen partial pressures (PO2) from 0.01 Pa to 10 Pa and substrate temperatures (T-s) from 25 & DEG;C to 800 & DEG;C were investigated. X-ray diffraction (XRD) patterns results showed that amorphous ScYSZ thin films were formed at room substrate temperature while cubic polycrystalline thin films were obtained at higher substrate temperatures (T-s = 200 & DEG;C, 400 & DEG;C, 600 & DEG;C, 800 & DEG;C). Raman spectra revealed a distinct Raman shift at around 600 cm(-1) supporting a cubic phase. However, a transition from cubic to tetragonal phase can be observed with increasing oxygen partial pressure. Photoemission spectroscopy (PES) spectra suggested supporting analysis that more oxygen vacancies in the lattice can be observed for samples deposited at lower oxygen partial pressures resulting in a cubic structure with higher dopant cation binding energies as compared to the tetragonal structure observed at higher oxygen partial pressure. On the other hand, dense morphologies can be obtained at lower PO2 (0.01 Pa and 0.1 Pa) while more porous morphologies can be obtained at higher PO2 (1.0 Pa and 10 Pa).
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