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Multidisciplinary Sciences
Fabrication of ZnO nanorods based gas sensor pattern by photolithography and lift off techniques
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Summary: This paper mainly focuses on the fabrication of ZnO nanorod based gas sensor, aiming to detect volatile organic compounds (VOCs) with low power consumption, low cost, and simple manufacturing method. By optimizing the structure of the sensor components, particularly the ZnO nanorods, a high sensitivity sensor suitable for human breath analysis was successfully developed. The morphology and phase analysis of the sensing material and sensor pattern were carried out using SEM, EDS, and XRD, confirming the nanorod-like structure with optimal diameters for efficient gas sensing applications.
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