期刊
VACUUM
卷 193, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.vacuum.2021.110493
关键词
Optical waveguide; Terbium scandium aluminum garnet; Ion implantation; Diamond blade dicing
资金
- Postgraduate Research and Practice Innovation Program of Jiangsu Province [KYCX20_0794]
- National Natural Science Foundation of China [11405041, 61905119]
- Jiangxi Province Science Foundation [20192BAB217015]
- University Natural Science Research Project of Jiangsu Province [19KJB140013]
- NUPTSF [NY219101]
The translation introduces the process of fabricating optical waveguides in terbium scandium aluminum garnet using helium ion implantation and diamond blade dicing, as well as key parameters involved. It also discusses the potential suitability of these waveguides as candidates for optical waveguide isolators.
Terbium scandium aluminum garnet crystal is a promising material which has excellent characteristics for magneto-optical devices. We report on the fabrication of optical planar and ridge waveguides in the terbium scandium aluminum garnet by using combination of helium ion implantation and precise diamond blade dicing. The conditions for the ion implantation are an energy of 400 keV and a fluence of 6 x 10(16) ions/cm(2). The rotating velocity and cutting speed of the diamond blade were set to be 20,000 rpm and 0.1 mm/s, respectively. The implantation depth and distributions of energy loss were calculated by the stopping and range of ions in matter 2013. The refractive index distribution and the dark-mode spectrum for the implanted planar waveguide were obtained by the reflectivity calculation method and the prism coupling system, respectively. The near-field intensity profiles of both the planar and ridge waveguides were measured by the end-face coupling technique. The optical guiding properties of the terbium scandium aluminum garnet waveguides suggest that they can serve as candidates for optical waveguide isolators.
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