期刊
SURFACE & COATINGS TECHNOLOGY
卷 427, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2021.127811
关键词
Atomic layer deposition; Atomic layer plasma treatment; Corrosion protection; Magnesium-calcium alloy
资金
- Ministry of Science and Technology of Taiwan [MOST 109-2221-E-002-116, MOST 1102221-E-002-047-MY3]
- Russian Foundation for Basic Research, Russia [20-58-S52001]
ALPT technique enhances the corrosion protection of TALD-ZrO2 film by increasing crystallinity and reducing oxygen defects, with the best result achieved at 30s treatment time.
Atomic layer plasma treatment (ALPT) enhances the corrosion protection of the ZrO2 film prepared by thermaldriven ALD mode (TALD-ZrO2) and further reduces the corrosion rate of Mg Ca alloy by more than an order of magnitude. The ALPT effect significantly increases the crystallinity and reduces the oxygen defects of TALD-ZrO2 film. The ALPT time of 30 s has the most increase in the polarization resistance of TALD-ZrO2 film, from 1.81k Omega.cm(2) to 74.71k Omega.cm(2). The enhancement of corrosion resistance of TALD-ZrO2 film caused by the 30s-ALPT is equivalent to the thickness effect of increasing the thickness from 200 cycles to 300 cycles. ALPT technique is considered as a potential and feasible method to prepare TALD-ZrO2 films with high film quality and excellent corrosion protection.
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