4.3 Article

Structural properties of Ge-Sb-Te alloys

期刊

SOLID-STATE ELECTRONICS
卷 185, 期 -, 页码 -

出版社

PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.sse.2021.108101

关键词

GST; Ge-rich GST; Thermal annealing; Phase change materials

资金

  1. European Union [783176, H2020/2014-2020]
  2. TUBITAK-ARDEB [117E765]
  3. ECSEL Joint Undertaking project WAKeMeUP

向作者/读者索取更多资源

The structural properties of Germanium-Antimony-Tellurium (GST) and Ge-rich GST thin film samples were investigated in this work. The films were studied after annealing at various temperatures, and analysis techniques such as X-Ray Diffraction, FTIR, Raman Spectroscopy, and SEM equipped with EDS were used to study the evolution of the structure in the samples.
In this work, we have investigated the structural properties of Germanium (Ge)-Antimony (Sb)-Tellurium (Te) (GST) and Ge-rich GST thin film samples. The structural properties of the films are studied after annealing temperatures from room temperature to 450 degrees C. We performed the annealing procedure using a heat rate of 10 degrees C/min to achieve the target temperature for a duration of 10 min under N2 flow. After heat treatment, we carried out X-Ray Diffraction (XRD), Fourier Infra-Red Spectroscopy (FTIR), Raman Spectroscopy and Scanning Electron Microscopy (SEM) equipped with Energy-dispersive X-ray spectroscopy (EDS) to investigate the evolution of the structure in the samples.

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