4.8 Article

Multifunctional Ion-Sensitive Floating Gate Fin Field-Effect Transistor with Three-Dimensional Nanoseaweed Structure by Glancing Angle Deposition Technology

期刊

SMALL
卷 18, 期 5, 页码 -

出版社

WILEY-V C H VERLAG GMBH
DOI: 10.1002/smll.202104168

关键词

glancing angle deposition; ion-sensitive floating gate field-effect transistors; multiple ion detection; nanoseaweed structures

资金

  1. Ministry of Science and Technology [109-2221-E-007-048, 110-2634-F-007-023-, 110-2112-M-007-032-MY3, 110-2221-E-007-057-MY3, 110-2119-M-007-003-MBK]

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A multifunctional ion-sensitive floating gate Fin field-effect transistor (ISFGFinFET) for hydrogen and sodium detection is demonstrated, showing competitive performance with other state-of-the-art ion sensors. The ISFGFinFET can detect and improve sensitivity for both hydrogen and sodium ions, and demonstrate the functionality of multiple ions detection simultaneously.
A multifunctional ion-sensitive floating gate Fin field-effect transistor (ISFGFinFET) for hydrogen and sodium detection is demonstrated. The ISFGFinFET comprises a FGFET and a sensing film, both of which are used to detect and improve sensitivity. The sensitivity of the ISFGFinFET can be adjusted by modulating the coupling effect of the FG. A nanoseaweed structure is fabricated via glancing angle deposition (GLAD) technology to obtain a large sensing area to enhance the sensitivity for hydrogen ion detection. A sensitivity of 266 mV per pH can be obtained using a surface area of 3.28 mm(2). In terms of sodium ion detection, a calix[4]arene sensing film to monitor sodium ions, obtaining a Na+ sensitivity of 432.7 mV per pNa, is used. In addition, the ISFGFinFET demonstrates the functionality of multiple ions detection simultaneously. The sensor arrays composed of 3 x 3 pixels are demonstrated, each of which comprise of an FGFET sensor and a transistor. Furthermore, 16 x 16 arrays with a decoder and other peripheral circuits are constructed and simulated. The performance of the proposed ISFGFinFET is competitive with that of other state-of-the-art ion sensors.

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