期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 347, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2021.130466
关键词
Integrated optics; Mid-infrared; Gas sensor; Chalcogenide glass waveguide
资金
- Natural Science Foundation of China [61875098, 61874078]
- Zhejiang Provincial Natural Science Founda-tion of China [LY20F050003, LY20F050001]
- Natural Science Founda-tion of Ningbo [2018A610133, 2019A610078]
- K. C. Wong Magna Fund in Ningbo University
A suspended slot chalcogenide glass waveguide gas sensor is proposed, designed, and analyzed in detail, achieving high power confinement factor within a specific wavelength range and demonstrating strong detection performance for methane gas. The optimization of structural parameters leads to improved sensitivity and limit of detection for the proposed waveguide sensor.
In this paper, we propose, design, and analyze a suspended slot chalcogenide glass waveguide gas sensor in detail. Within a bandwidth from 3.0 mu m to 4.4 mu m, a power confinement factor of larger than 90 % can be achieved by rationally optimizing structural parameters of the proposed waveguide sensor. When the methane is considered as the target gas, the power confinement factor, sensitivity, and limit of detection of the proposed waveguide sensor are respectively 93.81 %, 0.4578, and 18.17 ppm at a wavelength of 3.67 mu m. If the operating wavelength is selected to be 3.291 mu m, the power confinement factor, sensitivity, and limit of detection will be 91.98 %, 7.151, and 1.139 ppm, respectively.
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