4.7 Article

Conductometric nitrogen dioxide gas sensors based on sol-gel-prepared hafnium-added indium zinc oxide (Hf-IZO)

期刊

SENSORS AND ACTUATORS B-CHEMICAL
卷 344, 期 -, 页码 -

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2021.130198

关键词

Hafnium indium zinc oxide; Gas sensor; NO2; Sol-gel; Oxygen vacancy

资金

  1. Korea Basic Science Institute (KBSI), National Research Facilities & Equipment Center (NFEC) - Korea government (Ministry of Education) [2019R1A6C1030010]
  2. KIAT [P0006858]
  3. MOTIE in Rep. Korea [P0006858]
  4. National Research Foundation of Korea [2019R1A6C1030010] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

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Based on hafnium-added indium zinc oxide (Hf-IZO), a nitrogen dioxide (NO2) gas sensor was produced and showed high response and selectivity to NO2 gas, as well as long-term stability. The sensing performance of the 15 at% Hf-IZO sensor is linked to the concentration of oxygen vacancies generated by the hafnium doping.
We produce a nitrogen dioxide (NO2) gas sensor based on hafnium-added indium zinc oxide (Hf-IZO). Among the samples of various Hf concentrations (0, 5, 9, 15, 30, and 100 at%), the gas sensor based on the 15 at% Hf-IZO shows the highest response of 79.6 to NO2 gas of 2.2 ppm, which is about 8.3 times higher than that of the pristine IZO sample. The 15 at% Hf-IZO sensor also exhibits a high selectivity to other gases, a good long-term stability up to 3 months, and a similar gas response even when humidity is varied across a wide range of 0 through 60 %RH measured by a humidity sensor. The microstructural and chemical states of the materials are characterized using X-ray diffraction (XRD), transmission electron microscopy (TEM), and X-ray photoelectron spectroscopy (XPS) for investigation of the mechanism behind the high sensing performance. The characterization results, combined with the sensor data, disclose a link between the concentration of oxygen vacancies generated in the 15 at% Hf doped IZO and gas response.

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