A mode-localized DC electric field sensor

This paper reports a DC electric field sensor (EFS) based on the mode localization phenomenon. The EFS consists of 3-degrees-of-freedom weakly coupled resonators (WCRs) and two capacitor arrays that are electrostatically coupled with the WCRs. The capacitor arrays sense the electric field and produce a stiffness perturbation that causes an amplitude ratio change of the WCRs. The EFS is fabricated using a silicon-on-insulator process and evaluated in a vacuum chamber. The amplitude ratio of the resonators changes from 2.2 to 7.5 as the electric field strength ranges from 0 to 7 kV/m, with a sensitivity of 0.76 /(kV/m). The noise, resolution, and stability of the mode-localized EFS are 11.5 (V/m)/root Hz, 22.9 V/m, and 9.1 V/m, respectively, which are competitive compared with that of other high-performance micromachined EFS. (c) 2021 Elsevier B.V. All rights reserved.

Automated summary

This paper presents a DC electric field sensor based on the mode localization phenomenon, which utilizes the amplitude ratio change of resonators to sense the electric field strength, demonstrating high sensitivity and stability compared to other high-performance micromachined EFS.