4.7 Article

Polymer-derived ceramic thin-film temperature sensor

期刊

SENSORS AND ACTUATORS A-PHYSICAL
卷 332, 期 -, 页码 -

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2021.113038

关键词

Direct writing; Polymer-derived ceramics; Thin film; Temperature sensor

资金

  1. Aero Engine Corporation of China (AECC) [HFZL2018CXY015-2]
  2. Shenyang Aero Engine Research Institute of AECC [JC3602007026]
  3. Sichuan Gas Turbine Research Institute of AECC [GJLZ-2020-0059]

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This work successfully addresses the monitoring challenges of machines in harsh environments by fabricating an ultra-thin-film temperature sensor, providing a new solution for aerospace applications.
In-situ monitoring of machines in harsh environment remains challenging due to lack of high-performance sensors. Most of sensors cannot survive over 600 degrees C even with packaging. In this work, an ultra-thin-film temperature sensor was fabricated based on polymer-derived ceramics (PDCs) via direct-writing for aerospace applications. The sensitive film with thickness of 10 mu m consists of polymer-derived SiCN filled with TiB2, ZrB2 and SiC nano-particles. The resistance-temperature dependence tests of the sensor indicates that the resistance of the PDC thin film decreases monotonically with rising temperature and exhibits good repeatability at temperatures from room temperature to 800 degrees C in the air environment. The fabricated thin-film sensor shows great potential for high temperature applications and the technological routine provides a feasible pathway for structure function integration in aerospace manufacture. (C) 2021 Elsevier B.V. All rights reserved.

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