4.7 Article

Flexible piezoresistive three-dimensional force sensor based on interlocked structures

期刊

SENSORS AND ACTUATORS A-PHYSICAL
卷 330, 期 -, 页码 -

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2021.112857

关键词

Flexible sensor; Three-dimensional force sensor; Piezoresistive; Electrospray; Laser direct writing

资金

  1. Fundamental Research Funds for the Central Universities of China [20720200068]

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The flexible three-dimensional force sensor, mimicking bionic human skin, utilizes contact resistance changes from three interlocked hemispheres units for force detection. The sensor demonstrates good sensitivity and response time, suitable for applications like precise grasping.
Three-dimensional force sensing has attracted increasing attention due to the rising application requirements from smart robots. Herein, we report a flexible three-dimensional force sensor with an interlocked structure as bionic human skin, which consists of flexible silicone substrate and polymer composite materials. Surface piezoresistive layer is patterned through electrospray and laser direct writing. The sensing mechanism is based on the contact resistance changes from three interlocked hemispheres units from either the normal force or the shear force. Shear force directional detection is rendered through three-axis structural arrangement in-plane. As a result, the sensor displays a normal force sensitivity of 6.33 kPa(-1), response time of 59 ms, and shear force angular resolution of below 30 degrees. The manufacturing method is amenable for minimized sensor array fabrication. Further application is demonstrated with a mechanical arm for gripping objects, where the sensor provides in-time feedback for precise grasping. (C) 2021 Elsevier B.V. All rights reserved.

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