相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。CMOS MEMS Thermal Flow Sensor With Enhanced Sensitivity for Heating, Ventilation, and Air Conditioning Application
Wei Xu et al.
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS (2021)
Study on Fusion Mechanisms for Sensitivity Improvement and Measurable Pressure Limit Extension of Pirani Vacuum Gauges With Multi Heat Sinks
Junhua Lai et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2020)
Multi-perspective collaborative scheduling using extended genetic algorithm with interval-valued intuitionistic fuzzy entropy weight method
Wenyu Zhang et al.
SENSORS AND ACTUATORS A-PHYSICAL (2020)
Compact-GC platform: A flexible system integration strategy for a completely microsystems-based gas-chromatograph
Stefano Zampolli et al.
SENSORS AND ACTUATORS B-CHEMICAL (2020)
High Sensitivity and Wide Dynamic Range Thermoresistive Micro Calorimetric Flow Sensor With CMOS MEMS Technology
Wei Xu et al.
IEEE SENSORS JOURNAL (2020)
Simultaneous Flow and Thermal Conductivity Sensing on a Single Chip Using Artificial Neural Networks
Ethan L. W. Gardner et al.
IEEE SENSORS JOURNAL (2020)
A Characterization of the Performance of Gas Sensor Based on Heater in Different Gas Flow Rate Environments
Linxi Dong et al.
IEEE TRANSACTIONS ON INDUSTRIAL INFORMATICS (2020)
Recent advances in micro detectors for micro gas chromatography
Hemi Qu et al.
SCIENCE CHINA-MATERIALS (2019)
High sensitive Polyimide-based single-walled carbon nanotube thermal film sensor for fluid shear stress measurements
Wei Gao et al.
SMART MATERIALS AND STRUCTURES (2019)
Temperature Effects of a Ceramic MEMS Thermal Wind Sensor Based on a Temperature-Balanced Mode
Shang Wang et al.
IEEE SENSORS JOURNAL (2019)
Design and applications of MEMS flow sensors: A review
Fatemeh Ejeian et al.
SENSORS AND ACTUATORS A-PHYSICAL (2019)
A Platinum Cantilever-Based Thermal Conductivity Detector for Ammonia Sensing Using the 3-Omega Technique
Ardalan Lotfi et al.
ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY (2019)
Measurement of fluid thermal conductivity using a micro-beam MEMS sensor
Hiroshi Takamatsu et al.
INTERNATIONAL JOURNAL OF HEAT AND MASS TRANSFER (2018)
Toward calibration-free wall shear stress measurement using a dual hot-film sensor and Kelvin bridges
Xuanhe Liu et al.
MEASUREMENT SCIENCE AND TECHNOLOGY (2018)
Investigation and Optimization of Pirani Vacuum Gauges With Monocrystal Silicon Heaters and Heat Sinks
Le-Min Zhang et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2017)
Flow rate independent sensing of thermal conductivity in a gas stream by a thermal MEMS-sensor - Simulation and experiments
Christoph J. Hepp et al.
SENSORS AND ACTUATORS A-PHYSICAL (2017)
Multi-parameter monitoring of binary gas mixtures: Concentration and flow rate by DC excitation of thermal sensor arrays
Christoph J. Hepp et al.
SENSORS AND ACTUATORS A-PHYSICAL (2017)
Investigating a Micro Pirani Gauge for Multi-Function Sensing
Ming Zhang et al.
IEEE SENSORS JOURNAL (2016)
Theoretical and Experimental Investigations of Thermoresistive Micro Calorimetric Flow Sensors Fabricated by CMOS MEMS Technology
Wei Xu et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2016)
An integrated temperature-compensated flexible shear-stress sensor microarray with concentrated leading-wire
Jian Tang et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2016)
Micro thermal conductivity detector with flow compensation using a dual MEMS device
G. de Graaf et al.
SENSORS AND ACTUATORS A-PHYSICAL (2016)
A fully electronic microfabricated gas chromatograph with complementary capacitive detectors for indoor pollutants
Yutao Qin et al.
MICROSYSTEMS & NANOENGINEERING (2016)
Transient thermal response of micro-thermal conductivity detector (mu TCD) for the identification of gas mixtures: An ultra-fast and low power method
Alireza Mahdavifar et al.
MICROSYSTEMS & NANOENGINEERING (2015)
A dynamic thermal flow sensor for simultaneous measurement of thermal conductivity and flow velocity of gases
Ali Sukru Cubukcu et al.
SENSORS AND ACTUATORS A-PHYSICAL (2014)
Air flow sensing using micro-wire-bonded hair-like hot-wire anemometry
M. M. Sadeghi et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2013)
A micro gas chromatography column with a micro thermal conductivity detector for volatile organic compound analysis
J. H. Sun et al.
REVIEW OF SCIENTIFIC INSTRUMENTS (2013)
Simultaneous flow and thermal conductivity measurement of gases utilizing a calorimetric flow sensor
Diego F. Reyes Romero et al.
SENSORS AND ACTUATORS A-PHYSICAL (2013)
Effect of forced convection on thermal distribution in micro thermal conductivity detectors
B. C. Kaanta et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2011)
Temperature distribution on thermal conductivity detectors for flow rate insensitivity
B. C. Kaanta et al.
SENSORS AND ACTUATORS A-PHYSICAL (2011)
Design, modeling, microfabrication and characterization of novel micro thermal conductivity detector
Jianhai Sun et al.
SENSORS AND ACTUATORS B-CHEMICAL (2011)
Novel device for calibration-free flow rate measurements in micro gas chromatographic systems
B. C. Kaanta et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2010)
Microfabricated thermal conductivity detector for the micro-ChemLab™
D. Cruz et al.
SENSORS AND ACTUATORS B-CHEMICAL (2007)
Effects of gas type on the sensitivity and transition pressure of integrated thermal flow sensors
P. Bruschi et al.
SENSORS AND ACTUATORS A-PHYSICAL (2006)
Micromachined structures for thermal measurements of fluid and flow parameters
JJ van Baar et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2001)
分享论文
