期刊
SENSORS
卷 22, 期 3, 页码 -出版社
MDPI
DOI: 10.3390/s22031277
关键词
inkjet printing; ECoG sensor; microelectrode array; Parylene-C; flexible substrate; neural probe
资金
- National Science Foundation [CBET 0923173, DUE 1022757]
A highly flexible 22-channel ECoG microelectrode array was developed using novel fabrication techniques, and in vivo studies showed potential clinical application prospects.
Electrocorticography (ECoG) is a conventional, invasive technique for recording brain signals from the cortical surface using an array of electrodes. In this study, we developed a highly flexible 22-channel ECoG microelectrode array on a thin Parylene film using novel fabrication techniques. Narrow (<40 mu m) and thin (<500 nm) microelectrode patterns were first printed on PDMS, then the patterns were transferred onto Parylene films via vapor deposition and peeling. A custom-designed, 3D-printed connector was built and assembled with the Parylene-based flexible ECoG microelectrode array without soldering. The impedance of the assembled ECoG electrode array was measured in vitro by electrochemical impedance spectroscopy, and the result was consistent. In addition, we conducted in vivo studies by implanting the flexible ECoG sensor in a rat and successfully recording brain signals.
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