期刊
RENEWABLE ENERGY
卷 179, 期 -, 页码 2295-2299出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.renene.2021.08.054
关键词
Ion implantation; Phosphorus emitter; PERC solar cell; Al2O3/SiNx rear passivation stack; Firing temperature; Simplified process flow
The study introduces a simplified process flow for the fabrication of ion implanted PERC cells with Al2O3/SiNx rear passivation stack without any rear side processing, achieving a power conversion efficiency of 20% at large area. The research also highlights the sensitivity of solar cell efficiency to firing peak temperature, implantation dose, and Al2O3 thickness.
Ion implanted PERC cells have already achieved power conversion efficiencies of about 20.0%. The process flows reported in the literature for the ion implanted PERC cells with commonly utilized Al2O3/SiNx rear passivation stack, which has the benefit of being less sensitive to surface roughness than SiO2/SiNx stack passivation, notably suffer from the additional process steps such as single side polishing and single side protection. Here, we present a simplified process flow for the fabrication of ion implanted PERC cells having Al2O3/SiNx stack passivation at the textured rear surface without any rear side processing, leading to a power conversion efficiency of 20% at large area. In this context, we show the sensitivity of solar cell efficiency to firing peak temperature, implantation dose, and Al2O3 thickness. The results of the present research will provide a basis for high efficiency implanted PERC cells with significantly reduced workload and cost. (c) 2021 Elsevier Ltd. All rights reserved.
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