4.6 Article

Comparative analysis of different charged particles emerging from a broad beam ion source

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RADIATION PHYSICS AND CHEMISTRY
卷 189, 期 -, 页码 -

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PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.radphyschem.2021.109718

关键词

Charged particle; Positive ion; Electron; Neutral particles; Ion source

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The research modified the ion-source to produce differently charged particles, finding that the amount of neutral particles and electrons depends on the positive ion current, gas pressure, and gas type. Increasing gas pressure can increase the ratio of neutral particles to positive charge, reaching 1.2 in the case of argon and 1.45 in the case of nitrogen gas.
In this research, the ion-source is modified to produce differently charged particles; that could be successfully used in a variety of applications. The different parameters affecting the particles; neutral charge, electron, and positive ion emerging from a broad beam cold cathode ion source are studied using argon and nitrogen gases. The neutral and the electron current are measured using a simple technique. It is found that the neutral particles and the electrons depend on the positive ion current, gas pressure, and gas type. Also, the ratio of the neutral to the positive charge is increased by increasing the gas pressure and its reach to 1.2 at pressure 4 x 10(-4) mbar in case of argon and reach to 1.45 at pressure 5 x 10(-4)mbar in case of nitrogen gas. Also; it is found that the ratio of the electron to the positive charge is inversely proportional to the gas pressure in the case of argon gas. But in the case of the nitrogen gas it is found that this ratio is directly proportional and reaches 2.1 at pressure 5 x 10(-4)mbar.

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