4.7 Article

Polysilicon contact structures for silicon solar cells using atomic layer deposited oxides and nitrides as ultra-thin dielectric interlayers

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Energy & Fuels

Double-sided TOPCon solar cells on textured wafer with ALD SiOx layer

Mickael Lozac'h et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2020)

Article Physics, Applied

Influence of layer thickness on passivation properties in SiOx/Al2O3 stacks

Anton Ek et al.

JOURNAL OF APPLIED PHYSICS (2020)

Article Energy & Fuels

Ultra-thin atomic layer deposited aluminium oxide hole-selective contacts for silicon solar cells

Zheng Xin et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2019)

Article Energy & Fuels

Studying dopant diffusion from Poly-Si passivating contacts

Frank Feldmann et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2019)

Article Energy & Fuels

Impact of phosphorus diffusion on n-type poly-Si based passivated contact silicon solar cells

Jian Sheng et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2019)

Proceedings Paper Green & Sustainable Science & Technology

Study on the Interfacial Oxide in Passivating Contacts

Jana-Isabelle Polzin et al.

9TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2019) (2019)

Article Energy & Fuels

Passivation property of ultrathin SiOx:H / a-Si:H stack layers for solar cell applications

Mickael Lozac'h et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2018)

Article Energy & Fuels

Temperature-dependent contact resistance of carrier selective Poly-Si on oxide junctions

N. Folchert et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2018)

Article Energy & Fuels

Phosphorus diffused LPCVD polysilicon passivated contacts with in-situ low pressure oxidation

Kean Chern Fong et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2018)

Article Nanoscience & Nanotechnology

Structural Properties of Al-O Monolayers in SiO2 on Silicon and the Maximization of Their Negative Fixed Charge Density

Daniel Hiller et al.

ACS APPLIED MATERIALS & INTERFACES (2018)

Article Energy & Fuels

A Study on the Charge Carrier Transport of Passivating Contacts

Frank Feldmann et al.

IEEE JOURNAL OF PHOTOVOLTAICS (2018)

Proceedings Paper Energy & Fuels

Controlling P and B Diffusion During Polysilicon Formation

Machteld Lamers et al.

SILICONPV 2018: THE 8TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (2018)

Article Materials Science, Multidisciplinary

On the recombination behavior of p+-type polysilicon on oxide junctions deposited by different methods on textured and planar surfaces

Yevgeniya Larionova et al.

PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE (2017)

Article Materials Science, Multidisciplinary

Metallisation of Boron-Doped Polysilicon Layers by Screen Printed Silver Pastes

Sebastian Mack et al.

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2017)

Article Energy & Fuels

Gallium-Doped Poly-Si:Ga/SiO2 Passivated Emitters to n-Cz Wafers With iVoc > 730 mV

David L. Young et al.

IEEE JOURNAL OF PHOTOVOLTAICS (2017)

Proceedings Paper Energy & Fuels

Comparative study of differently grown tunnel oxides for p-type passivating contacts

Rik van der Vossen et al.

7TH INTERNATIONAL CONFERENCE ON SILICON PHOTOVOLTAICS, SILICONPV 2017 (2017)

Article Nanoscience & Nanotechnology

Silicon-Rich Silicon Carbide Hole-Selective Rear Contacts for Crystalline-Silicon-Based Solar Cells

Gizem Nogay et al.

ACS APPLIED MATERIALS & INTERFACES (2016)

Article Materials Science, Multidisciplinary

Polycrystalline silicon passivated tunneling contacts for high efficiency silicon solar cells

Bill Nemeth et al.

JOURNAL OF MATERIALS RESEARCH (2016)

Article Energy & Fuels

n-Type polysilicon passivating contact for industrial bifacial n-type solar cells

M. K. Stodolny et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2016)

Proceedings Paper Energy & Fuels

In-situ doping and local overcompensation of high performance LPCVD polysilicon passivated contacts as approach to industrial IBC cells

Yu Wu et al.

PROCEEDINGS OF THE 6TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2016) (2016)

Article Nanoscience & Nanotechnology

Atomic Layer Deposition of Silicon Nitride from Bis(tert-butylamino)silane and N2 Plasma

Harm C. M. Knoops et al.

ACS APPLIED MATERIALS & INTERFACES (2015)

Article Materials Science, Coatings & Films

Thermal and plasma enhanced atomic layer deposition of TiO2:Comparison of spectroscopic and electric properties

Chittaranjan Das et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2015)

Article Materials Science, Multidisciplinary

Silicon nitride/silicon oxide interlayers for solar cell passivating contacts based on PECVD amorphous silicon

Di Yan et al.

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2015)

Article Energy & Fuels

Tunnel oxide passivated carrier-selective contacts based on ultra-thin SiO2 layers

Anamaria Moldovan et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2015)

Article Energy & Fuels

Ion Implantation for Poly-Si Passivated Back-Junction Back-Contacted Solar Cells

Udo Roemer et al.

IEEE JOURNAL OF PHOTOVOLTAICS (2015)

Article Physics, Applied

Tunnel oxide passivated contacts formed by ion implantation for applications in silicon solar cells

Christian Reichel et al.

JOURNAL OF APPLIED PHYSICS (2015)

Article Physics, Applied

Carrier-selective contacts for Si solar cells

F. Feldmann et al.

APPLIED PHYSICS LETTERS (2014)

Article Materials Science, Multidisciplinary

Ion implantation into amorphous Si layers to form carrier-selective contacts for Si solar cells

Frank Feldmann et al.

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2014)

Article Energy & Fuels

Recombination behavior and contact resistance of n+ and p+ poly-crystalline Si/mono-crystalline Si junctions

Udo Roemer et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2014)

Article Physics, Applied

Influence of plasma chemistry on impurity incorporation in AlN prepared by plasma enhanced atomic layer deposition

Alexander Pyymaki Perros et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2013)

Article Electrochemistry

Plasma-Assisted ALD for the Conformal Deposition of SiO2: Process, Material and Electronic Properties

G. Dingemans et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2012)

Article Physics, Applied

Electronic and chemical properties of the c-Si/Al2O3 interface

Florian Werner et al.

JOURNAL OF APPLIED PHYSICS (2011)

Article Electrochemistry

Relation Between Enhancement in Growth and Thickness-Dependent Crystallization in ALD TiO2 Thin Films

Seong Keun Kim et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2011)

Article Materials Science, Multidisciplinary

Excellent silicon surface passivation with 5 Å thin ALD Al2O3 layers: Influence of different thermal post-deposition treatments

Armin Richter et al.

PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS (2011)

Proceedings Paper Electrochemistry

Plasma-Assisted Atomic Layer Deposition of Low Temperature SiO2

G. Dingemans et al.

SILICON NITRIDE, SILICON DIOXIDE, AND EMERGING DIELECTRICS 11 (2011)

Article Physics, Applied

Silicon surface passivation by atomic layer deposited Al2O3

B. Hoex et al.

JOURNAL OF APPLIED PHYSICS (2008)

Article Electrochemistry

Bis(diethylamino) silane as the silicon precursor in the atomic layer deposition of HfSiOx

Rajesh Katamreddy et al.

JOURNAL OF THE ELECTROCHEMICAL SOCIETY (2008)

Article Energy & Fuels

A review and comparison of different methods to determine the series resistance of solar cells

D. Pysch et al.

SOLAR ENERGY MATERIALS AND SOLAR CELLS (2007)

Article Physics, Applied

Passivation and interface state density of SiO2/HfO2-based/polycrystalline-Si gate stacks

RJ Carter et al.

APPLIED PHYSICS LETTERS (2003)

Article Physics, Applied

Low-temperature formation of silicon nitride gate dielectrics by atomic-layer deposition

A Nakajima et al.

APPLIED PHYSICS LETTERS (2001)

Article Physics, Applied

Boron penetration in p+ polycrystalline-Si/Al2O3/Si metal-oxide-semiconductor system

DG Park et al.

APPLIED PHYSICS LETTERS (2000)