期刊
PLASMA SOURCES SCIENCE & TECHNOLOGY
卷 30, 期 11, 页码 -出版社
IOP Publishing Ltd
DOI: 10.1088/1361-6595/ac3054
关键词
nonlocal plasma; negative glow plasma; probe diagnostic; electron energy distribution function; plasma electron spectroscopy; gas impurities detection
资金
- National Natural Science Foundation of China [12175050, 11775062]
- Foundation for the Advancement of Theoretical Physics and Mathematics BASIS [21-1-3-53-1]
The study further develops the PLES method for analyzing impurities of organic molecules and ammonia, successfully detecting various hydrocarbon impurities for the first time. The prototype of a PLES-gas analyzer based on nonlocal plasma of negative glow of a short glow discharge in helium is presented in the research.
The method of plasma electron spectroscopy (PLES) is further developed for the analysis of impurities of organic molecules and ammonia in this work. In particular, for the first time the PLES method was used to detect the hydrocarbons impurities: alkanes (methane) and alkenes (ethylene), as well as their derivatives alcohols (ethanol), radicals, and ammonia. As the energies of the registered characteristic electrons are different for different chemical compounds, an important advantage of the PLES method is the fact that it allows simultaneous (in one measurement) registration of various impurities. This work presents a prototype of a PLES-gas analyzer based on nonlocal plasma of negative glow of a short glow discharge in helium.
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