期刊
PLASMA PROCESSES AND POLYMERS
卷 19, 期 3, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.202100155
关键词
deep learning; global model; inverse model; plasma chemistry; plasma sources
资金
- National Natural Science Foundation of China [51790511, 51907204, 52025064, 91941105, 91941301]
Smart modulation of discharges is essential for generating specific reactive species efficiently. The DeePlaskin framework, combining deep learning and plasma physics/chemistry models, shows great potential for optimizing the design of non-equilibrium plasma systems.
Smart modulation of discharges is necessary to generate specific reactive species in an energy-efficient way. A physics corrected plasma + deep learning framework, the DeePlaskin, is proposed. This framework can be used for the nonequilibrium plasma systems that can be described by a global chemistry model (assuming global uniformity, e.g., in spark channels or the early afterglow of the fast ionization wave discharges). Knowing the kinetics scheme and the predefined temporal evolution of target species, we will be able to reconstruct the temporal profile of the reduced electric field E / N and all the other species. To generate the same concentration of O atom at the end of the discharge, the electric field profiles customized by the DeePlaskin differ significantly depending on the predefined evolution, resulting in different energy consumption. The combination of the deep learning method and plasma physics/chemistry model shows great potential in optimizing the design of plasma sources in practical applications.
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